Flexible Micro Thermoelectric Generator based on Electroplated Bi2Te3

We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2+xTe3-x thermocouples in a SU-8 mold. Demonstrator devices generate 278μWcm at ∆Tmeas=40K across the experimental set up. Based on model calculations, a temperature difference of ∆TG=21.4K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions.